1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1991 International Conference on Solid State Devices and Materials

1991 International Conference on Solid State Devices and Materials

1991年8月27日〜8月29日Pacifico Yokohama, Yokohama, Japan

[C-2-4]Sub-Quarter Micron Gate Fabrication Process Using Phase-Shifting-Mask for Microwave GaAs Devices

Kazuyuki Inokuchi、Tadashi Saito、Hideyuki Jinbo、Yoshio Yamashita、Yoshiaki Sano(1.Research and Development Group, Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1991.C-2-4
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