1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[A-1-1]A New Horizon of Plasma Enhanced CVD for Future Electron Devices

M. Hirose、H. Shin、S. Miyazaki(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1992.A-1-1
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