1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[A-2-1]Control of Si Solid-Phase Nucleation by Surface Steps for High Performance Thin Film Transistors

Tanemasa Asano、Kenji Makihira(1.Center for Microelectronic Systems, Kyushu Institute of Technology)
https://doi.org/10.7567/SSDM.1992.A-2-1