1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[A-2-2]Solid-Phase Nucleation Control of Amorphous Si by Step-Structure of Substrate Surface and Local P-Doping

M. Moniwa、K. Kusukawa、M. Ohkura、E. Takeda(1.Central Research Laboratory, Hitachi Ltd.)
https://doi.org/10.7567/SSDM.1992.A-2-2
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