1992 International Conference on Solid State Devices and Materials
1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
[A-2-4]Dislocation Engineering for Silicon Devices
J. S. Custer、J. R. Liefting、R. J. Schreutelkamp、R. C. M. Wijburg、H. Wallinga、F. W. Saris(1.FOM Institute for Atomic and Molecular Physics、2.University of Twente, MESA Research Institute、3.IMEC vzw)