1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[A-2-4]Dislocation Engineering for Silicon Devices

J. S. Custer、J. R. Liefting、R. J. Schreutelkamp、R. C. M. Wijburg、H. Wallinga、F. W. Saris(1.FOM Institute for Atomic and Molecular Physics、2.University of Twente, MESA Research Institute、3.IMEC vzw)
https://doi.org/10.7567/SSDM.1992.A-2-4