1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[B-1-1]Low-Temperature CVD of Amorphous-Silicon and Silicon-Nitride --A New Trend of TFT Technology--

Masakiyo Matsumura、Osamu Sugiura(1.Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.1992.B-1-1
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