1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[B-1-4]A Fabrication of Homogenious Poly-Si TFT's Using Excimer Laser Annealing

I. Asai、N. Kato、M. Fuse、T. Hamano(1.Electronic Imaging and Devices Research Laboratory, Fuji Xerox Co., Ltd.)
https://doi.org/10.7567/SSDM.1992.B-1-4