1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[D-1-6]The Suppression of Precipitation in Boro-Phospho-Silicate-Glass Films by Surface Control by Silylation (SCS) Process

Kousaku Yano、Yuka Terai、Sin-ichi Imai、Tetsuya Ueda、Satoshi Ueda、Masayuki Endoh、Noboru Nomura(1.Semiconductor Research Center Matsushita Electric Industrial Co., Ltd.)
https://doi.org/10.7567/SSDM.1992.D-1-6
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