1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[PA1-6]Critical Parameters for Obtaining Low Particle Densities in an HF-Last Process

J. L. Alay、S. Verhaverbeke、W. Vandervorst、M. Heyns(1.IMECvzw、2.LCMM, Facultat de Fisica, Universitat de Barcelona)
https://doi.org/10.7567/SSDM.1992.PA1-6
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