1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[PA1-7]Measurement of Physical Thickness of Native Oxide Using Accurately-Calibrated Atomic Force Microscope

Shintaro Aoyama、Yoshinori Nakagawa、Tadahiro Ohmi(1.Department of Electronics, Tohoku University)
https://doi.org/10.7567/SSDM.1992.PA1-7
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