1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[PA1-9]Silane Thermal Decomposition Characteristics on Various Si Surface

Tsuyoshi Watanabe、Masakazu Nakamura、Atsushi Ohki、Koji Kawada Shinji Miyoshi、Shinji Takahashi、Michael S. K Chen、Tadahiro Ohmi(1.Department of Electronics, Tohoku University)
https://doi.org/10.7567/SSDM.1992.PA1-9
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