1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[PA1-L10]AFM/STM Investigation of pn Junctions Formed by Ion Implantation

Yasuhiro SUGAWARA、Yoshinobu FUKANO、Seizo MORITA Akihiko NAKANO、Tohru IDA(1.Department of Physics, Faculty of Science, Hiroshima University、2.VLSI Development Laboratories, IC Group, Sharp Corporation)
https://doi.org/10.7567/SSDM.1992.PA1-L10
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