1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan
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International Conference on Solid State Devices and Materials
1992 International Conference on Solid State Devices and Materials

1992 International Conference on Solid State Devices and Materials

1992年8月26日〜8月28日Tsukuba Center Building, Tsukuba, Japan

[PA2-4]Nitrogen Dangling Bonds in Hydrogenated Amorphous Silicon Nitride Thin Films

J. Kanicki、W. L. Warren、E. H. Poindexter(1.IBM Research Division, Thomas J. Watson Research Center、2.Sandia National Laboratories、3.US Army ET&DL)
https://doi.org/10.7567/SSDM.1992.PA2-4
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