1994 International Conference on Solid State Devices and Materials
1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan
1994 International Conference on Solid State Devices and Materials
1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan
[S-I-11-3]Formation of High Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325nm Laser Holographic Exposure
Kazuya Okamoto、Yoshiaki Nakano、Kunio Tada(1.Central Research Laboratory, Nikon Corporation、2.Department of Electronic Engineering, University of Tokyo)
