1994 International Conference on Solid State Devices and Materials

1994 International Conference on Solid State Devices and Materials

1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1994 International Conference on Solid State Devices and Materials

1994 International Conference on Solid State Devices and Materials

1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan

[S-I-8-1]Electron-Beam Induced Etching as a Key Process in Through-Vacuum Fabrication of GaAs-AlGaAs Nanoheterostructures

Yoshifumi KATAYAMA、Tomonori ISHIKAWA、Nobuyuki TANAKA、Maximo LOPEZ、Isamu MATSUYAMA、Yuichi IDE、Masamichi YAMADA(1.Opotelectronics Technology Research Laboratory (OTL))
https://doi.org/10.7567/SSDM.1994.S-I-8-1
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