1994 International Conference on Solid State Devices and Materials
1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan
1994 International Conference on Solid State Devices and Materials
1994年8月23日〜8月26日Pacifico Yokohama, Yokohama, Japan
[S-I-8-3]Direct Patterning of the Current Confinement Structure for p-Type Column-III Nitrides by Low-Energy Electron Beam Irradiation Treatment
M. Inamori、H. Sakai、T. Tanaka、H. Amano、I. Akasaki(1.Department of Electrical and Electronic Engineering, Meijo University、2.Devices and Materials Department, Pioneer Electronic Corporation)
