1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
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International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-I-2-3]A New Low-Temperature Oxidation Technique by Gas Cluster Ion Beams

Makoto AKIZUKI、Jiro MATSUO、Satoru OGASAWARA、Mitsuaki HARADA、Atsumasa DOI、Isao YAMADA(1.Microelectronics Research Center, SANYO Electric Co., Ltd.、2.Ion Beam Engineering Experimental Laboratory, Kyoto University)
https://doi.org/10.7567/SSDM.1995.S-I-2-3
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