1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
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International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-I-2-5]Clarification of Nitridation Effect on Oxidation Methods

T. Kuroi、S. Shirahata、Y. Okumura、S. Shimizu、A. Teramoto、M. Anma、M. Inuishi、T. Hirao(1.ULSI Laboratory, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1995.S-I-2-5
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