1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-I-3-1]Defects in Amorphous Silicon-Nitrogen Alloy Films

Tatsuo SHIMIZU(1.Department of Electrical and Computer Engineering, Faculty of Engineering, Kanazawa University)
https://doi.org/10.7567/SSDM.1995.S-I-3-1