1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-I-4-3]Investigation of Interlayer Dielectric Material Influence on DRAM Retention Time

M. Ohishi、K. Matsui、K. Koyama(1.ULSI Device Development Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.1995.S-I-4-3