1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
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International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-IV-5]Formation of Metal/Silicon Contacts for ULSI and Induced Defects by Silicidation

Yukio YASUDA、Shigeaki ZAIMA(1.Department of Crystalline Materials Science, School of Engineering, Nagoya University)
https://doi.org/10.7567/SSDM.1995.S-IV-5
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