1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan
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International Conference on Solid State Devices and Materials
1995 International Conference on Solid State Devices and Materials

1995 International Conference on Solid State Devices and Materials

1995年8月21日〜8月24日International House, Osaka, Japan

[S-IV-9]Copper Interconnects Fabricated by Dry Etching Process

Yasushi Igarashi、Tomomi Yamanobe、Toshio Ito(1.Semiconductor Technology Laboratory, OKI Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1995.S-IV-9
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