1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-3-1]Metal CVD Technology for ULSI Applications: The Aluminum Route

Andreas KNORR、Jonathan FALTERMEIER、Robert TALEVI、Heidi GUNDLACH、Kaushik Arun KUMAR、Gregory G. PETERSON、Alain E. KALOYEROS(1.New York State Center for Advanced Thin Film Technology and Department of Physics, the University at Albany-SUNY)
https://doi.org/10.7567/SSDM.1996.A-3-1
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