1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-4-2]The Role of Hydrogen during Rapid Vapor-Phase Doping Analyzed by FTIR-ATR

Yukihiro KIYOTA、Seiji SUZUKI、Taroh INADA(1.Central Research Laboratory, Hitachi Ltd.、2.College of Engineering, Hosei University)
https://doi.org/10.7567/SSDM.1996.A-4-2
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