1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[A-5-3]Advanced Ti Salicide Technology for High Performance Quarter-Micron Logic LSIs

Jun Suenaga、Hirofumi Sumi、Kazuhiro Tajima、Atsushi Horiuchi、Michihiro Kanno、Yutaka Okamoto(1.MOS Process dept., MOS LSI div., Semiconductor Company, Sony Corporation)
https://doi.org/10.7567/SSDM.1996.A-5-3
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