1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-1-2]Effects of Cleavage on Local Cross-Sectional Stress Distribution in Trench Isolation Structure

Atsushi YAGISHITA、Tomohiro SAITO、Satoshi MATSUDA、Yukihiro USHIKU(1.Microelectronics Engineering Laboratories, Toshiba Corporation)
https://doi.org/10.7567/SSDM.1996.B-1-2
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