1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-1-5]CMP with Pad-Press Ring for Superior Uniformity Performance

Mikio Nishio、Tomoyasu Murakami、Masashi Hamanaka(1.Semiconductor Research Center, Matsushita Electric Industrial, Co., Ltd.、2.Kyoto Research Laboratory, Matsushita Electronics Corporation)
https://doi.org/10.7567/SSDM.1996.B-1-5
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