1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[B-2-4]A Proposed Atomic-Layer-Deposition of Germanium on Si(100)

Takuya KITAMURA、Satoshi SUGAHARA、Tomonori NAGAI、Yasutaka UCHIDA、Masakiyo MATSUMURA(1.Department of Physical Electronics, Tokyo Institute of Technology、2.Department of Electronics and Information Science, Teikyo University of Science and Technology)
https://doi.org/10.7567/SSDM.1996.B-2-4
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