1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan
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International Conference on Solid State Devices and Materials
1996 International Conference on Solid State Devices and Materials

1996 International Conference on Solid State Devices and Materials

1996年8月26日〜8月29日Pacifico Yokohama, Yokohama, Japan

[D-1-2]Highly Selective Wet-Etching Using Adipic Acid for Uniform Damage-Free Process of InAlAs/InGaAs HEMTs

Katsuhiko HIGUCHI、Hiroyuki UCHIYAMA、Takashi SHIOTA、Makoto KUDO、Tomoyoshi MISHIMA(1.Central Research Lab., Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1996.D-1-2
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