1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan

[A-2-3]Phosphorous Incorporation in Ultrathin Gate Oxides and Its Impact to the Network Structure

Kohichi Morino、Seiichi Miyazaki、Masataka Hirose(1.Department of Electrical Engineering, Hiroshima University)
https://doi.org/10.7567/SSDM.1997.A-2-3
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