1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan

[B-1-5]The Effect of Capacitor Electrode Contaminant on High Density DRAM's Device Characteristics

Y. Kawai、E. Uchida、M. Itoh、M. Yoshimaru、J. Ida(1.Oki Electric Industry Co., Ltd. VLSI R&D Center)
https://doi.org/10.7567/SSDM.1997.B-1-5
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