1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan

[B-2-1]Properties of Highly Oriented Ta2O5 on Metal Electrodes

Koichi Kishiro、Nobuhiko Inoue、Shih-Chang Chen、Masaki Yoshimaru(1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)
https://doi.org/10.7567/SSDM.1997.B-2-1