1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan

[B-2-2]Deposition of Epitaxial Yittria-Stabilized Zirconia (YSZ) on Si(100) and Simultaneous Growth of Amorphous SiO2 Interlayer

Tomonobu HATA、Yutaka MASUDA、Shin'ichi NAKANO、Kimihiro SASAKI、Yohko HANEDA、Kiyotaka WASA(1.Department of Electrical and Computer Engineering, Kanazawa University、2.RITE)
https://doi.org/10.7567/SSDM.1997.B-2-2
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