1997 International Conference on Solid State Devices and Materials
1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
[C-2-1]Wafer Bonding of InP to Si and Its Application to Optical Devices
Hiroshi Wada、Takeshi Kamijoh(1.Optoelectronics Oki Laboratory, Real World Computing Partnership c/o Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.)