1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan
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International Conference on Solid State Devices and Materials
1997 International Conference on Solid State Devices and Materials

1997 International Conference on Solid State Devices and Materials

1997年9月16日〜9月19日ACT CITY Hamamatsu, Hamamatsu, Japan

[D-2-3]Atomic Force Microscope Study of Two-Dimensional Dopant Delineation by Selective Chemical Etching

Kwang-Ki Choi、Tae-Yeon Seong、Dong-Ho Lee、Yong Sun Shon、Chung Tae Kim(1.Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST)、2.Memory R&D Division, Hyundai Electronics Co., Ltd.)
https://doi.org/10.7567/SSDM.1997.D-2-3
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