1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

1998年9月7日〜9月10日International Conference Center Hiroshima, Hiroshima, Japan
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International Conference on Solid State Devices and Materials
1998 International Conference on Solid State Devices and Materials

1998 International Conference on Solid State Devices and Materials

1998年9月7日〜9月10日International Conference Center Hiroshima, Hiroshima, Japan

[A-2-4]New PentaCoordinated Si(PCS) Model for SiN CVD Mechanism

Shigehiko Saida、Yoshitaka Tsunashima(1.Microelectronics Engineering Laboratory, TOSHIBA Corp.)
https://doi.org/10.7567/SSDM.1998.A-2-4
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