1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

1999年9月21日〜9月24日Nihon Toshi Center Kaikan, Tokyo, Japan
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International Conference on Solid State Devices and Materials
1999 International Conference on Solid State Devices and Materials

1999 International Conference on Solid State Devices and Materials

1999年9月21日〜9月24日Nihon Toshi Center Kaikan, Tokyo, Japan

[B-1-4]The Impact of Nitrogen Implantation at LDD(NIL) on Deep Sub-Micron CMOS Devices

Sung-Kwon Hong、Sang-Gi Lee、Jae-Gyung Ahn、Dae-Gwan Kang、Jeong-Mo Hwang(1.LG Semicon Co., Ltd, R&D Division)
https://doi.org/10.7567/SSDM.1999.B-1-4
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