2000 International Conference on Solid State Devices and Materials

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
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International Conference on Solid State Devices and Materials
2000 International Conference on Solid State Devices and Materials

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜8月31日Sendai International Center, Sendai, Japan

[A-1-3]Indium Profile Control for Super Steep Retrograde (SSR) Well

T. Matsuda、A. Mineji、N. Nishio、H. Kitajima(1.ULSI Device Development Division, NEC Electron Devices, NEC Corporation)
https://doi.org/10.7567/SSDM.2000.A-1-3
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