2000 International Conference on Solid State Devices and Materials

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
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International Conference on Solid State Devices and Materials
2000 International Conference on Solid State Devices and Materials

2000 International Conference on Solid State Devices and Materials

2000年8月29日〜8月31日Sendai International Center, Sendai, Japan

[A-2-5]Dielectric Breakdown and Light Emission in Copper Damascene Structure under Bias-Temperature Stress

Ken-ichi Takeda、Kenji Hinode、Junji Noguchi、Hizuru Yamaguchi(1.Central Research Laboratory, Hitachi LTD.、2.Device Development Center, Hitachi LTD.)
https://doi.org/10.7567/SSDM.2000.A-2-5
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