2000 International Conference on Solid State Devices and Materials
2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
2000 International Conference on Solid State Devices and Materials
2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
[B-1-6]70nm NMOSFET Fabrication with 12nm n+-p Junctions Using As2+A Low Energy Ion Implantations
Byung Yong Choi、Suk Kang Sung、Byung Gook Park、Jong Duk Lee(1.Inter-university Semiconductor Research Center, School of Electrical Engineering, Seoul National University)
