2000 International Conference on Solid State Devices and Materials
2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
[B-2-1]20nm MOS Devices for the Birth of the 21st Century
Simon Deleonibus、Guillaume Bertrand、Georges Guegan、Michel Heitzmann、Pierre Mur、David Souil、Serge Tedesco(1.LETI (CEA-GRENOBLE) Departement de Microelectronique)