2000 International Conference on Solid State Devices and Materials
2000年8月29日〜8月31日Sendai International Center, Sendai, Japan
[B-2-4]Impact of Strained-Si Channel on CMOS Circuit Performance under the Sub-100nm Regime
Tetsuo Hatakeyama、Kazuya Matsuzawa、Shin-ichi Takagi(1.Advanced LSI Technology Laboratory, Corporate Research & Development Center, Toshiba Corporation)