2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan

[A-1-4]Dishing-Free Cu Chemical Mechanical Polishing Process Based on Endpoint Detection with Laser Beam

Y. Tokuyama、H. Ogawa、M. Yanagisawa、J. Kikuchi、H. Nakagawa、Y. Horiike(1.Department of Materials Science, School of Engineering, The University of Tokyo、2.Speedfam Co., Ltd.、3.Axiomatec Inc.、4.Semiconductor Company, Matsushita Electric Industrial Co., Ltd)
https://doi.org/10.7567/SSDM.2001.A-1-4
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