2001 International Conference on Solid State Devices and Materials
2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
[A-2-3]The Effect of Organic Contaminations Molecular Weights in the Cleanroom Air on MOS Devices Degradation--a Controlled Laminar Air Flow Experiment
Takeshi Ohkawa、Yoshihide Wakayama、Sadao Kobayashi、Shigetoshi Sugawa、Herzl Aharoni、Tadahiro Ohmi(1.Department of Electronic Engineering, Tohoku University、2.New Industry Creation Hatchery Center, Tohoku University、3.Taisei Corporation、4.Department of Electrical and Computer Engineering Ben-Gurion University of the Negev Beer-Sheva)
