2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan

[A-2-4]Impact of Gate Etch Damage and Profile in High Density DRAM Cell

Il-Gweon Kim、Jung-wan Bae、Jun-Ho Choy、Nam-Sung Kim、Young-Woo Kweon、Se-Kyoung Choi、Sung-Chul Kim、Joo-Seog Park、Ji-Byum Kim(1.TG4-P9, Memory R&D Division, Hynix Semiconductor Inc.)
https://doi.org/10.7567/SSDM.2001.A-2-4
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