2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan

[A-2-5]Effect of Poly Metal Gate Etch Post-Cleaning on the Tail Distribution of DRAM Data Retention Time

Nam-Sung Kim、Il-Gweon Kim、Jun-Ho Choy、Se-Kyeong Choi、Jo-Bong Choi、Young-Woo Kweon、Sung-Cheul Kim、Ju-Seok Park、Ji-Bum Kim(1.Technology Group 4, Memory R&D Division, Hynix Semiconductor Co., Ltd.)
https://doi.org/10.7567/SSDM.2001.A-2-5
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