2001 International Conference on Solid State Devices and Materials
2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
2001 International Conference on Solid State Devices and Materials
2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
[A-2-8]Filling of Tungsten into Deep Trench Using Time-Modulation CVD Method
Y. Igarashi、T. Morooka、Y. Yamada、T. Nakamura、K. W. Lee、K. T. Park、H. Kurino、M. Koyanagi(1.Dept. of Machine Intelligence and Systems Engineering, Tohoku Univ.、2.JST(Japan Science and Technology Corporation))
