2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan

[B-1-2]Three-Dimensional Integration of Fully Depleted SOI Devices

T. Morooka、T. Nakamura、Y. Yamada、Y. Igarashi、K. W. Lee、K. T. Park、H. Kurino、M. Koyanagi(1.Dept. of Machine Intelligence and Systems Engineering, Tohoku University、2.JST(Japan Science and Technology Corporation))
https://doi.org/10.7567/SSDM.2001.B-1-2
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