2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
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International Conference on Solid State Devices and Materials
2001 International Conference on Solid State Devices and Materials

2001 International Conference on Solid State Devices and Materials

2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan

[B-1-6]Oxygen Plasma Activated Silicon Direct Bonding in PECVD Mode

T. H. Kim、M. M. R. Howlader、T. Itoh、T. Suga(1.Research Center for Advanced Science and Technology (RCAST), The University of Tokyo)
https://doi.org/10.7567/SSDM.2001.B-1-6
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