2001 International Conference on Solid State Devices and Materials
2001年9月26日〜9月28日Diamond Hotel, Tokyo, Japan
[B-2-2]Interconnect Length Distribution in Si System ULSI
Naohiro Takagi、Hiyouko Shinoki、Tomohito Tsushima、Yoshisato Yokoyama、Kazuya Masu(1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)